Advances in Rapid Thermal and Integrated Processing 18 Rumler & Velte

Rumler & Velte

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Advances in Rapid Thermal and Integrated Processing 18 Rumler & VelteRapid thermal and integrated processing is an emerging single wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues,